ZYGO ZMI-4104C Control System DCS Displacement Measurement Module

Description

The ZMI-4104C ZYGO control system DCS displacement measurement module is a high-precision displacement measurement device launched by ZYGO company (now a brand under AMETEK), designed specifically for industrial automation and precision measurement applications.

1. Product Overview
model: ZMI-4104C
Manufacturer: ZYGO (a brand under AMETEK)
Category: Displacement Measurement Module, Suitable for DCS (Distributed Control System)
Application areas: semiconductor manufacturing, optical processing, precision machinery, scientific research experiments, etc

2. Technical specifications
Measurement principle: Based on interferometer technology, high-precision displacement measurement is achieved using laser interference principle.
Resolution: Sub nanometer level (specific resolution depends on model configuration, such as 0.15 nm, 0.31 nm, etc.).
Measurement range: Supports expansion to up to 64 measurement axes, meeting the multidimensional measurement needs of complex systems.
Maximum speed: ± 2.55 m/s (specific speed according to model configuration).
Accuracy: At maximum speed, the accuracy can reach 0.2 nm (σ).
Compatibility: Compatible with ZYGO’s ZMI ™ Series lasers (such as 7705, 7702, 7714, and 7724).
Interface: Supports modular installation of VME chassis for easy system integration.

3. Functional features
High precision measurement: Utilizing ZYGO’s proprietary interferometer technology, it provides sub nanometer displacement resolution, suitable for precision measurement scenarios.
Multi axis expansion: Supports up to 64 measurement axes to meet the multidimensional measurement needs of complex systems.
High speed measurement: The maximum measurement speed can reach ± 2.55 m/s, suitable for displacement monitoring of high-speed moving objects.
Modular design: adopting 6U VME or 6U VME64x board types, making it easy to integrate into existing DCS systems.
Cyclic error compensation: It has the function of cyclic error compensation, which can automatically eliminate system errors and improve measurement accuracy.
Strong compatibility: Compatible with multiple ZYGO lasers, making it convenient for users to choose the appropriate laser source according to their needs.
4. Application scenarios
Semiconductor manufacturing: used for displacement monitoring of equipment such as wafer processing and lithography machines to ensure processing accuracy.
Optical processing: Real time monitoring of displacement and deformation of workpieces in precision machining of optical components.
Precision machinery: used for displacement measurement of high-precision machine tools, coordinate measuring machines (CMM) and other equipment.
Research experiments: Provide high-precision displacement data support in fields such as materials science and nanotechnology.
5. Advantages
High precision and high speed: Combining sub nanometer resolution and high-speed measurement capabilities, it meets the high requirements of precision manufacturing and scientific research.
Flexible Expansion: Supports multi axis measurement and adapts to system requirements of different scales and complexities.
Easy to integrate: Modular design facilitates integration with existing DCS systems, reducing system upgrade costs.
High reliability: As a leading brand in the field of precision measurement, ZYGO’s products undergo rigorous testing to ensure long-term stable operation.
6. Market feedback
Industry recognition: ZYGO’s ZMI series displacement measurement module enjoys a high reputation in the fields of semiconductor, optics, and precision manufacturing, and has been adopted by many well-known enterprises.
Technological leadership: With patented interferometer technology and error compensation algorithms, ZMI-4104C has significant technological advantages among similar products.